Microsystems Technology
Bachelor-/ Master Theses
- Masterthesis: Untersuchungen des flexoelektrischen Effekts in TiO² Dünnfilmen mit MEMS Strukturen
- Masterthesis: Novel Sound Generation with MEMS Membranes
- Masterthesis: Simulation of High-Q MEMS Resonators
- Masterthesis: MEMS Sensors for Next Generation Nanotechnology
- Masterthesis: Understanding Next Generation PowerDevices by observing "fingerprints" in semiconductors
- Masterthesis: Electromagnetic MEMS Vibration Energy Harvester based on 2D-Halbach-Array
- Bachelor-/Masterthesis: Fabrication of High-Quality Silicon Oxide Nanolayers using Plasma Technology
- Bachelor-/Masterthesis: Materialparameter auf der atomaren Längenskala mit Licht vermessen
- Bachelor-/Masterthesis: The Flexoelectric Effect and its Use in MEMS
- Bachelor-/Masterthesis: Electrowetting on hydrophobic substrates for tunable optical lens applications