Microsystems Technology
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Microsystems Technology

The research division Microsystems technology at the Institute of Sensor and Actuator Systems is focusing on the modeling, the simulation, the fabrication and the charaterization of komplex 3D structures at a micro- or nano-scale. Our goals are the development of innovative sensor concepts as well as the optimization of existing sensor systems in terms of its robustnest, reliability and flexibility.

You can find more information here: Research areas Publications/Patents

Das Team

Contact information of the entire Team can be found here.