Microsystems Technology
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MEMS Measurement Lab

Key Equipment

  • Scanning electron microscope: SEM Hitachi SU8030
  • Atomic force microscope: AFM Brucker Dimension Edge
  • DLTS (Deep Level Transient Spectroscopy) measurement equipment
  • Laser Doppler vibrometer

Further Equipment

Effusion measurement equipment, electrical characterization (IVT, CVT, 3ω), high frequency measurement setup, high temperature gauge factor measurement setup, impedance measurement setup

Contact

Prof. Ulrich Schmid
Tel.:        +43 (1) 58801 36689
Email:     ulrich.e366.schmid@tuwien.ac.at