MEMS Measurement Lab
Key Equipment
Scanning electron microscope: SEM Hitachi SU8030
Atomic force microscope: AFM Brucker Dimension Edge
DLTS (Deep Level Transient Spectroscopy) measurement equipment
Laser Doppler vibrometer
Further Equipment
Effusion measurement equipment, electrical characterization (IVT, CVT, 3ω), high frequency measurement setup, high temperature gauge factor measurement setup, impedance measurement setup
Contact
Prof. Ulrich Schmid
Tel.: +43 (1) 58801 36689
Email: ulrich.e366.schmid@tuwien.ac.at