MEMS Technology Lab
Key Equipment
Von Adenne Sputter equipment LS730S
CVD Equipment EasyTube 3000 LPCVD furnace
Further Equipment at the Institute
Standard lithography equipment, PECVD, DRIE, XeF2 etching equipment, AMMT etching cell
Contact
Prof. Ulrich Schmid
Tel.: +43 (1) 58801 36689
Email: ulrich.e366.schmid@tuwien.ac.at