Key Equipment

• Von Adenne Sputter equipment LS730S

• CVD Equipment EasyTube 3000 LPCVD furnace

Further Equipment at the Institute

Standard lithography equipment, PECVD, DRIE, XeF2 etching equipment, AMMT etching cell

Contact

Prof. Ulrich Schmid
Tel.:        +43 (1) 58801 36689
Email:     ulrich.e366.schmid@tuwien.ac.at