Microsystems Technology
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MEMS Technology Lab

Key Equipment

  • Von Adenne Sputter equipment LS730S
  • CVD Equipment EasyTube 3000 LPCVD furnace

Further Equipment at the Institute

Standard lithography equipment, PECVD, DRIE, XeF2 etching equipment, AMMT etching cell

Contact

Prof. Ulrich Schmid
Tel.:        +43 (1) 58801 36689
Email:     ulrich.e366.schmid@tuwien.ac.at