Innovative materials

We study fundamental material properties with regard to potential applications in micro- and nano-fabricated devices and systems as well as power electronic components.

Piezo and flexoelelectric Materials

Carbon-based functional
Materials

Low Temperature Cofired Ceramics (LTCC)

Modeling and Simulation

We study the fundamentals of resonantly operating micro and nano-structures to contribute a better understanding of MEMS/NEMS

Quantum-Limited AFM

Fluid Structure Interaction

Devices and Systems

We design and fabricate novel micro- and nanomechanical devices and systems for future applications

Piezo-based
Devices

Carbon-based
Devices